Best Semiconductor ETFs: Top Chip Sector ETFs Listed

Semiconductor ETFs track companies that design, manufacture, and supply the chips powering everything from smartphones to AI accelerators. The industry itself spans three distinct business models — fabless designers like NVIDIA and Qualcomm, pure-play foundries like TSMC (the world’s first dedicated merchant foundry, established in 1987), and integrated device manufacturers such as Intel and Texas Instruments that handle both design and fabrication.

The most widely traded chip sector ETFs each take a different approach to covering this value chain:

• SMH (VanEck Semiconductor ETF): Tracks the MVIS US Listed Semiconductor 25 Index with a concentrated, market-cap-weighted portfolio of 26 stocks. Launched in 2011, its top holdings include NVIDIA, TSMC, Broadcom, and ASML.
• SOXX (iShares Semiconductor ETF): Launched in 2001 by BlackRock, it follows the NYSE Semiconductor Index with 30 holdings and caps individual positions at 10%. It includes both U.S. and international firms.
• XSD (SPDR S&P Semiconductor ETF): Uses an equal-weighted methodology, spreading exposure across large-, mid-, and small-cap semiconductor stocks. Launched in 2006 by State Street.
• SOXQ (Invesco PHLX Semiconductor ETF): Tracks the PHLX Semiconductor Index with 30 holdings. Launched in 2021, it shares nine of its top ten positions with SOXX but undercuts it on fees.
• FTXL (First Trust Nasdaq Semiconductor ETF): A smart-beta fund that weights its holdings using value and liquidity factors rather than pure market capitalization.

The key difference between these semiconductor ETFs lies in their weighting: SMH is heavily concentrated in its top ten names, SOXX applies a 10% cap per holding, and XSD spreads risk equally across the portfolio. Equipment makers like Lam Research and Applied Materials appear in several of these funds alongside chip designers and foundries.

For a broader look at the companies these ETFs hold, see our list of leading chip and semiconductor manufacturers by market cap, or explore largest AI companies — a sector deeply intertwined with semiconductor demand. You can also browse our full directory of ETFs by sector and industry.

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The table below lists semiconductor and chip ETFs with live pricing, performance data, and fund details.